Formation of cubic boron nitride by the reactive sputter deposition of boron
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Boron Nitride Sputter Erosion Measurements by Cavity Ring-Down Spectroscopy
Sputter erosion is a critically important process in many electric propulsion (EP) devices from the point of view of both lifetime assessment and contamination effects. In many Hall thrusters erosion of boron nitride (BN) is of primary interest. In this contribution we introduce the use of cavity ring-down spectroscopy (CRDS) as a diagnostic for measurement of sputtered BN. The measurement appr...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 1997
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00395-7